Liquid Encapsulation Technology for Microelectromechanical Systems
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چکیده
منابع مشابه
The Effect of Material Properties on Sensitivity of the Microelectromechanical Systems Piezoelectric Hydrophone
In this paper, we present mathematical analyses to consider the effect of material properties on the sensitivity of the Microelectromechanical systems (MEMS) piezoelectric hydrophone and improve the sensitivity by choosing the proper material. The selected structure in the present paper is a piezoelectric hydrophone able to work at low frequencies. The piezoelectric hydrophones are widely used ...
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